Browsing by Author "Bencher, Chris"

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Characterization of EUV resists for defectivity at 32nm

Montal, Ofir
;
Dolev, Ido
;
Rosenzweig, Moshe
;
Dotan, Kfir
;
Meshulach, Doron
;
Adan, Ofer
Proceedings paper
2011, Metrology, Inspection, and Process Control XXV, 27/02/2011, p.79710G
Mandrel-based patterning: density multiplication techniques for15nm nodes

Bencher, Chris
;
Dai, Huixiong
;
Miao, Liyan
;
Chen, Yongmei
;
Xu, Ping
;
Chen, Yijian
Proceedings paper
2011, Optical Microlithography XXIV, 27/02/2011, p.79730K