Browsing by Author "Benndorf, Michael"
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Publication Experimental investigation of the impact of line-edge roughness on MOSFET performance and yield
Proceedings paper2003, 33rd European Solid-State Devices Research Conference - ESSDERC, 16/09/2003, p.227-230Publication Studies of the defectivity formation mechanismes between the top coats and the resists in immersion lithography
Proceedings paper2005, 2nd International Symposium on Immersion Lithography, 12/09/2005