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Experimental investigation of the impact of line-edge roughness on MOSFET performance and yield
Publication:
Experimental investigation of the impact of line-edge roughness on MOSFET performance and yield
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Croon, Jeroen
;
Leunissen, Peter
;
Jurczak, Gosia
;
Benndorf, Michael
;
Rooyackers, Rita
;
Ronse, Kurt
;
Decoutere, Stefaan
;
Sansen, Willy
;
Maes, Herman
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1956
since deposited on 2021-10-15
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Acq. date: 2025-12-10
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Metrics
Views
1956
since deposited on 2021-10-15
2
last month
1
last week
Acq. date: 2025-12-10
Citations