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Experimental investigation of the impact of line-edge roughness on MOSFET performance and yield

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1956 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2025-12-10

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1956 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2025-12-10

Citations