Browsing by Author "Berney, Jean"
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Publication Advanced metrology for beyond silicon semiconductor device structures
Proceedings paper2015, Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 14/04/2015, p.220-223Publication Recent progress in advanced in-line metrology for high-mobility semiconductors
Proceedings paper2015, Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 14/04/2015, p.85-87Publication Seeing the invisible: metrology for extended crystalline defects in beyond silicon semiconductors
Proceedings paper2016, International SiGe Technology and Device Meeting - ISTDM, 7/06/2016Publication Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
Meeting abstract2017, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 21/03/2017