imec Institutional Repository Browsing {{ collection }} by Author "Berry, I."

Publication

Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions

Kesters, Els

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Le, Quoc Toan

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Boullart, Werner

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Han, Q.

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Berry, I.

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Waldfried, C.

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Mertens, Paul

Proceedings paper

2005, Cleaning Technology in Semiconductor Devices Manufacturing IX, 16/10/2005, p.319-326

Publication

Modifications of porous low-k by plasma treatments and wet cleans

Xu, Kaidong

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Henry, Sally-Ann

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Kraus, Harald

Proceedings paper

2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.409-416

Publication

Optimization of resist ash processes on Si045Ge055 substrates for post extension-halo ion implantation

Mannaert, Geert

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Vos, Rita

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Tsvetanova, Diana

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Altamirano Sanchez, Efrain

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Witters, Liesbeth

Proceedings paper

2011, ULSI Process Integration 7, 9/10/2011, p.283-291

Browsing by Author "Berry, I."