Browsing by Author "Bianchi, Davide"
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Publication 2D and 3D photoresist line roughness characterization
Journal article2013, Microelectronic Engineering, 110, p.100-107Publication 2D and 3D photoresist line roughness characterization
Oral presentation2012, 38th International Micro & Nano Engineering Conference - MNEPublication Impact of EUV lithography line edge roughness on 16 nm memory generation
Oral presentation2011, 55th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication - EIPBNPublication Linking EUV lithography line edge roughness and 16 nm NAND memory performance
Journal article2012, Microelectronic Engineering, (98) 10, p.24-28