Browsing by Author "Blachut, Gregory"

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A progress report on DSA of high-chi silicon containing block co-polymers

Willson, C. Grant
;
Janes, Dustin
;
Ito, Natsuko
;
Blachut, Gregory
;
Sirard, Stephen
Proceedings paper
2018, Advances in Patterning Materials and Processes XXXV, 25/02/2018, p.105860O
Directed self-assembly of silicon-containing block copolymers for 20nm lithography

Blachut, Gregory
;
Sirard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, SPIE Advanced Lithography Conference
Directed self-assembly of silicon-containing block copolymers with a hybrid chemo-/grapho-epitaxial flow

Blachut, Gregory
;
Sirard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, ACS Spring Meeting
Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures

Blachut, Gregory
;
Sirard, Stephen
;
Liang, Andrew
;
Mack, Chris
;
Maher, Michael
Proceedings paper
2018, Advanced Etch Technology for Nanopatterning VII, 25/02/2018, p.1058907