Browsing by Author "Boedecker, Sebastian"
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Publication Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques
Proceedings paper2009-06, Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21/06/2009, p.549-552Publication Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonators
Proceedings paper2009-06, Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21/06/2009, p.1417-1420