Browsing by Author "Bogan, Justin"
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Publication Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films
Journal article2020, ACS Applied Materials & Interfaces, (12) 4, p.4678-4688Publication Characterisation of electroless deposited cobalt by hard and soft X-ray photoemission spectroscopy
Proceedings paper2018, 18th IEEE International Conference on Nanotechnology - IEEE-NANO, 23/07/2018, p.1-4Publication Nucleation and adhesion of ultra-thin copper films on amino-terminated self-assembled monolayers
Journal article2018, Applied Surface Science, 462, p.38-47Publication On the reliability of Cu contacts for the 32nm technology node and beyond
Proceedings paper2009, International Conference on Solid State Devices and Materials - SSDM, 7/10/2009, p.799-800Publication The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
Meeting abstract2019, ISSC-22 Interdisciplinary Surface Science Conference 2019, 15/04/2019, p.56