Browsing by Author "Borden, P."
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Publication Carrier illumination as a tool to probe implant dose and electrical activation
Proceedings paper2003, Characterization and Metrology for ULSI Technology, 24/03/2003, p.758-763Publication Carrier illumination for characterization of ultrashallow doping profiles
Journal article2004-02, Journal of Vacuum Science and Technology B, (22) 1, p.439-443Publication Carrier illumination for monitoring of CMOS ultra-shallow junctions
Oral presentation2002, E-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and DevicesPublication Junction and profile analysis using carrier illumination
Proceedings paper2002, Silicon Front-End Junction Formation Technologies, 1/04/2002, p.285-290Publication Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS