Browsing by Author "Bowden, Mark"
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Publication Advanced etching for nanodevices and 2D materials
Meeting abstract2016, SNM special session at MNE Conference, 19/09/2016Publication Development and characterization of a fast neutral beam source for damage-free etching
Meeting abstract2014, 41st IOP Plasma Physics Conference, 14/04/2014Publication Development of a novel wafer probe for in-situ measurements
Oral presentation2013, Plasma Technological Workshop UKPublication Development of a novel wafer probe for in-situ measurements
Meeting abstract2014, Plasma Etch and Strip in Microelectronics Workshop - PESM, 12/05/2014Publication Development of a novel wafer-probe for in situ measurements of thin film properties
Journal article2015, Plasma Sources Science and Technology, (24) 3, p.32002Publication Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
Journal article2015, Plasma Sources Science and Technology, (24) 6, p.65008Publication Modulation of microwave resonance probes