Browsing by Author "Braginsky, O."

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Effect of VUV and EUV radiation on utra low-k materials damage

Braginsky, O.
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Kovalev, A.
;
Lopaev, D.
;
Mankelevich, Y.
;
Proshina, O.
;
Rakhimova, T.
;
Rakhimov, A.
Proceedings paper
2013, Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability, 1/04/2013, p.AA03.11
Modification of OSG based low-k films under EUV and VUV exposure

Rakhimova, T.
;
Rakhimov, A.
;
Mankelevich, Y.
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Lopaev, D.
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Kovalev, A.
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Vasil'eva, A.
;
Proshina, O.
Journal article
2013, Applied Physics Letters, 102, p.111902
Ultra low-k dielectrics damage under VUV and EUV radiation

Zyryanov, S.
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Braginsky, O.
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Kovaev, A.
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Lopaev, D.
;
Mankelevich, Y.
;
Rakhimova, T.
;
Rakhimov, A.
Meeting abstract
2012, 65th Gaseous Electronics Conference, 22/10/2012, p.CT2.00005