Browsing by Author "Broman, Par"
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Publication Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures
Journal article2021-05-27, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 2, p.021005Publication CNT pellicles: Imaging results of the first full-field EUV exposures
Proceedings paper2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116090Z