Publication:

Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

Date

2021-05-27
Journal article
https://doi.org/10.1117/1.JMM.20.2.021005
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Published version 2.85 MB

Author(s)

Bekaert, Joost  
;
Gallagher, Emily  
;
Jonckheere, Rik  
;
Van Look, Lieve  
;
Aubert, Remko  
;
Klein, Alexander
;
Yegen, Gokay
;
Broman, Par
;
Nair, Vineet Vijayakrishnan  
;
Timmermans, Marina  
;
Pollentier, Ivan  
;
Hendrickx, Eric  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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2644 since deposited on 2021-11-02
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