Publication:

Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

Date

2021-05-27
Journal article
https://doi.org/10.1117/1.JMM.20.2.021005
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dc.contributor.authorBekaert, Joost
dc.contributor.authorGallagher, Emily
dc.contributor.authorJonckheere, Rik
dc.contributor.authorVan Look, Lieve
dc.contributor.authorAubert, Remko
dc.contributor.authorKlein, Alexander
dc.contributor.authorYegen, Gokay
dc.contributor.authorBroman, Par
dc.contributor.authorNair, Vineet Vijayakrishnan
dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorHendrickx, Eric
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorAubert, Remko
dc.contributor.imecauthorNair, Vineet Vijayakrishnan
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecNair, Vineet Vijayakrishnan::0000-0002-8970-2425
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.date.accessioned2022-04-28T14:41:21Z
dc.date.available2021-11-02T16:00:21Z
dc.date.available2022-04-19T07:34:32Z
dc.date.available2022-04-28T14:41:21Z
dc.date.issued2021-05-27
dc.identifier.doi10.1117/1.JMM.20.2.021005
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37826
dc.publisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.source.beginpage021005
dc.source.issue2
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.numberofpages10
dc.source.volume20
dc.title

Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

dc.typeJournal article
dspace.entity.typePublication
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