Browsing by Author "Brunner, Timothy A."

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Dual monopole exposure strategy to improve extreme ultraviolet imaging

Franke, Joern-Holger
;
Brunner, Timothy A.
;
Hendrickx, Eric
Journal article
2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 3, p.030501
Image contrast metrology for EUV lithography

Brunner, Timothy A.
;
Truffert, Vincent
;
Ausschnitt, Kit
;
Kissoon, Nicola N.
;
Duriau, Edouard
Proceedings paper
2022-09-29, International Conference on Extreme UltraViolet Lithography, SEP 26-29, 2022, p.122920A
Validation of imaging benefits of Dual Monopole exposures

Brunner, Timothy A.
;
Franke, Joern-Holger
;
Truffert, Vincent
;
De Bisschop, Peter
Proceedings paper
2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275006