Browsing by Author "Burgess, Simon"
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Publication Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis
Proceedings paper2009, Electron Crystallography for Materials Research and Quantitative Characterization of Nanostructured Materials, 13/04/2009, p.HH08-08Publication Compositional depth profiling of TaCN thin films
Journal article2012, Journal of Vacuum Science and Technology A, (30) 4, p.41510