Browsing by Author "Capelli, Renzo"
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Publication EUV mask defect inspection for the 3nm technology node
Proceedings paper2023, 38th European Mask and Lithography Conference (EMLC 2023), 17/06/2023, p.Art. 128020HPublication Fundamental understanding and experimental verification of bright versus dark field imaging
Publication Stochastic printing behavior of ML-defects on EUV mask
Proceedings paper2019-09, International Conference on Extreme Ultraviolet Lithography 2019, 16/09/2019, p.111470P