Browsing by Author "Caputa, C."
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Publication Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Journal article2007, Journal of Applied Physics, (101) 1, p.14908Publication Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes