Browsing by Author "Caputa, C."
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Publication Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Journal article2007-01, Journal of Applied Physics, (101) 1, p.14908Publication Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes