Publication:
Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
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1987 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-10
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Metrics
Views
1987 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-10
Citations