Publication:

Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs

Date

2004
Presentation
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dc.contributor.authorGoux, Ludovic
dc.contributor.authorMenou, N.
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, M.
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorZhen, X.
dc.contributor.authorKaczer, Ben
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorMuller, C.
dc.contributor.authorCaputa, C.
dc.contributor.authorZambrano, R.
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.date.accessioned2021-10-15T13:37:55Z
dc.date.available2021-10-15T13:37:55Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8974
dc.source.conferenceThe 16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
dc.title

Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs

dc.typeOral presentation
dspace.entity.typePublication
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