Browsing by Author "Caron, Elke"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 3, p.Art. 034602Publication EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 127500PPublication Pattern deformation mitigation for EUV photoresists using wafer backside cleaning techniques