Browsing by Author "Chabal, Y.J."

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Gate oxide atomic layer deposition studied by in situ infrared spectroscopy

Frank, M.M.
;
Dörmann, S.
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Chabal, Y.J.
;
Sayan, S.
;
Garfunkel, E.
;
Wilk, G.D.
;
Green, M.L.
Oral presentation
2003, E-MRS Spring Meeting Symposium I Functional Metal Oxides - Semiconductor Structures
Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects

Wilk, G.D.
;
Frank, M.
;
Ho, M.Y.
;
Green, Martin
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Chabal, Y.J.
;
Raisanen, P.
;
Brijs, Bert
;
Sorsch, T.W.
Oral presentation
2002, Atomic Layer Deposition Conference - ALD