Browsing by Author "Chang, Chieh-Miao"
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Publication Innovative design solutions for avoiding at-resolution field stitching in high-NA EUV lithography
Proceedings paper2025-04-22, 2025 Conference on DTCO and Computational Patterning, 2025-04-22, p.134250E-1Publication Study of EUV stochastic defect on wafer yield
; ; Kim, Ryan Ryoung hanProceedings paper2024, Conference on DTCO and Computational Patterning III, FEB 26-29, 2024, p.1295404Publication Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification
Proceedings paper2024, 2024 Conference on Photomask Technology, 2024-09-29, p.132160I