Publication:

Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3036470

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Author(s)

Trivkovic, Darko

;

;

;

Chang, Chieh-Miao

;

;

Malacara, Victoria

;

Baskaran, Balakumar

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Drissi, Youssef

;

;

Miyaguchi, Kenichi

Journal

Proceedings of SPIE

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42 since deposited on 2025-08-29

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Acq. date: 2026-09-10