Publication:

Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3036470
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dc.contributor.authorTrivkovic, Darko
dc.contributor.authorShi, Xuelong
dc.contributor.authorTsai, Yi-Pei
dc.contributor.authorChang, Chieh-Miao
dc.contributor.authorWang, Jane
dc.contributor.authorMalacara, Victoria
dc.contributor.authorBaskaran, Balakumar
dc.contributor.authorDrissi, Youssef
dc.contributor.authorBekaert, Joost
dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorShi, Xuelong
dc.contributor.imecauthorTsai, Yi-Pei
dc.contributor.imecauthorChang, Chieh-Miao
dc.contributor.imecauthorWang, Jane
dc.contributor.imecauthorMalacara, Victoria
dc.contributor.imecauthorBaskaran, Balakumar
dc.contributor.imecauthorDrissi, Youssef
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.orcidimecTrivkovic, Darko::0009-0003-7858-1802
dc.contributor.orcidimecShi, Xuelong::0000-0001-9769-2231
dc.contributor.orcidimecWang, Jane::0000-0003-3321-0429
dc.contributor.orcidimecMalacara, Victoria::0009-0002-8048-9696
dc.contributor.orcidimecBaskaran, Balakumar::0000-0002-5651-7768
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.date.accessioned2025-08-29T03:57:13Z
dc.date.available2025-08-29T03:57:13Z
dc.date.issued2024
dc.identifier.doi10.1117/12.3036470
dc.identifier.eisbn978-1-5106-8158-3
dc.identifier.isbn978-1-5106-8157-6
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/46131
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage132160I
dc.source.conference2024 Conference on Photomask Technology
dc.source.conferencedate2024-09-29
dc.source.conferencelocationMonterey
dc.source.journalProceedings of SPIE
dc.source.numberofpages11
dc.title

Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification

dc.typeProceedings paper
dspace.entity.typePublication
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