Browsing by Author "Chang, Kao-Shuo"

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Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, Kao-Shuo
;
Green, M.L.
;
Suehle, J.
;
Hattrick-Simpers, J.
;
Takeuchi, I.
;
Ohmori, K.
;
Chikyow, T.
Proceedings paper
2008, Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing, 18/05/2008, p.151-159
Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology

Chang, Kao-Shuo
;
Green, Martin L.
;
Hattrick-Simpers, Jason R.
;
Takeuchi, Ichiro
;
Suehle, John S.
Journal article
2008-10, IEEE Transactions on Electron Devices, 55, p.2641-2647