Browsing by Author "Charavel, Remy"

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Wafer bevel protection during deep reactive ion etching

Charavel, Remy
;
Roig, Jaime
;
Altamirano Sanchez, Efrain
;
Van Aelst, Joke
;
Devriendt, Katia
Journal article
2011, IEEE Transactions on Semiconductor Manufacturing, (24) 2, p.358-365
Wafer bevel protection during deep reactive ion etching

Charavel, Remy
;
Gassot, Pierre
;
de Backer, E.
;
Altamirano Sanchez, Efrain
;
Van Aelst, Joke
Oral presentation
2010, 13th Technical and Scientific Meeting of ARCSIS : 'Manufacturing Challenges in European Semiconductor Fabs'