Browsing by Author "Chen, Chun-Cho"
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Publication Manufacturability issues for application of silicides in 0.25 μm CMOS process and beyond
Proceedings paper1996, Silicide Thin Films - Fabrication, Properties, and Applications, 27/11/1995, p.221-231Publication Ti-salicide improvement by preamorphization for ULSI applications
Proceedings paper1996, Silicide Thin Films - Fabrication, Properties, and Applications, 27/11/1995, p.89-94