Browsing by Author "Chen, Yongmei"

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Mandrel-based patterning: density multiplication techniques for15nm nodes

Bencher, Chris
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Dai, Huixiong
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Miao, Liyan
;
Chen, Yongmei
;
Xu, Ping
;
Chen, Yijian
Proceedings paper
2011, Optical Microlithography XXIV, 27/02/2011, p.79730K
Towards manufacturing a 10nm node device with complementary EUV lithography

Hermans, Jan
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Dai, Huixiong
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Niroomand, Ardavan
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Laidler, David
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Mao, Ming
;
Chen, Yongmei
Proceedings paper
2013, Extreme Ultraviolet (EUV) Lithography IV, 24/02/2013, p.86791K