Browsing by Author "Christiansen, S."

Now showing 1 - 3 of 3

Characteristics of low-k and ultralow-k PECVD deposited SiCOH films

Grill, A.
;
Patel, V.
;
Rodbell, K.P.
;
Huang, E.
;
Christiansen, S.
;
Baklanov, Mikhaïl
Proceedings paper
2002, Silicon Materials - Processing, Characterization, and Reliability, 1/04/2002, p.569-574
Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation

Reiche, M.
;
Moutanabbir, O.
;
Himcinschi, C.
;
Christiansen, S.
;
Erfurth, E.
;
Goesele, U.
;
Mantl, S.
Proceedings paper
2008, Semiconductor Wafer Bonding 10: Science, Technology, and Applications, 12/10/2008, p.311-320
Strained silicon-on-insulator : fabrication and characterization

Reiche, M.
;
Himcinschi, C.
;
Goesele, U.
;
Christiansen, S.
;
Mantl, S.
;
Buca, D.
;
Zhao, Q. T.
;
Feste, S.
Proceedings paper
2007, Silicon-on-Insulator Technology and Devices 13, 6/05/2007, p.339-344