Browsing by Author "Cirino, Giuseppe"
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Publication Diffraction gratings fabricated in DLC thin flms
Journal article2010, Surface and Coatings Technology, (204) 18_19, p.2966-2970Publication Diffractive optical element applied to proximity exposure lithography exploring partial light coherence
Proceedings paper2010, Latin America Optics and Photonics Conference - LAOP, 27/09/2010Publication Diffractive phase-shift lithography photomask operating in proximity printing mode
Journal article2010, Optics Express, (18) 16, p.16387-16405Publication Digital holography: computer-generated holograms and diffractive optics in scalar diffraction domain
Book chapter2011Publication Investigations of capacitively-coupled plasmas by electrostatic probe technique
Proceedings paper2015, 30th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2015, p.1-4Publication Low f-number microlens array fabricated in thick resist
Proceedings paper2012-04, Micro-Optics, 16/04/2012, p.842819Publication Phase-shift photomask designed by scalar diffractiontheory
Proceedings paper2009-09, 24th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2009, p.487-497Publication Tuned electrostatic probe for RF plasma diagnostics
Proceedings paper2013, Symposium on Microelectronics Technology and Devices - SBMICRO, 2/09/2013, p.1-4