Browsing by Author "Clark, R."
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Publication Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET
Proceedings paper2024, 2024 International Interconnect Technology Conference, 2024-06-03Publication Moore's Law meets High-NA EUV: Random via patterning for next-generation nodes
Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-22, p.1342412-1-1342412-7