Browsing by Author "Copel, M."

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Characterization of high-k films grown by atomic layer deposition

Vandervorst, Wilfried
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Conard, Thierry
;
Petry, Jasmine
;
Brijs, Bert
;
Bender, Hugo
Oral presentation
2002, MRS Spring Meeting
Physical and electrical properties of reactive molecular-beam-deposited aluminum nitride in metal-oxide-silicon structures

Ragnarsson, Lars-Ake
;
Bojarczuk, N.A.
;
Copel, M.
;
Gusev, E.P.
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Karasinski, J.
;
Guha, S.
Journal article
2003, Journal of Applied Physics, (93) 7, p.3912-3919
Thermal stability and scalability of zr-aluminate-based high-k gate stacks

Chen, Jerry
;
Cartier, Eduard
;
Carter, Richard
;
Kauerauf, Thomas
;
Zhao, Chao
;
Pétry, Jasmine
Proceedings paper
2002, Symposium on VLSI Technology: Digest of Technical Papers, 11/06/2002, p.192-193