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Thermal stability and scalability of zr-aluminate-based high-k gate stacks
Publication:
Thermal stability and scalability of zr-aluminate-based high-k gate stacks
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chen, Jerry
;
Cartier, Eduard
;
Carter, Richard
;
Kauerauf, Thomas
;
Zhao, Chao
;
Pétry, Jasmine
;
Cosnier, Vincent
;
Xu, Zhen
;
Kerber, Andreas
;
Tsai, Wilman
;
Young, Edward
;
Kubicek, Stefan
;
Caymax, Matty
;
Vandervorst, Wilfried
;
De Gendt, Stefan
;
Heyns, Marc
;
Copel, M.
;
Besling, Wim
;
Bajolet, Philippe
;
Maes, Jan
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2049
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2049
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations