Publication:

Thermal stability and scalability of zr-aluminate-based high-k gate stacks

Date

2002
Proceedings Paper
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Author(s)

Chen, Jerry
;
Cartier, Eduard
;
Carter, Richard
;
Kauerauf, Thomas
;
Zhao, Chao
;
Pétry, Jasmine
;
Cosnier, Vincent
;
Xu, Zhen
;
Kerber, Andreas
;
Tsai, Wilman
;
Young, Edward
;
Kubicek, Stefan  
;
Caymax, Matty  
;
Vandervorst, Wilfried  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Copel, M.
;
Besling, Wim
;
Bajolet, Philippe
;
Maes, Jan  

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2062 since deposited on 2021-10-14
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Acq. date: 2026-02-28

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