Browsing by Author "Cousin, Seth L."
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Publication A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography
;Cousin, Seth L. ;Bargsten, Clayton ;Rinard, Eric ;Ward, Rod ;Hosler, ErikPetersen, BrennanProceedings paper2020, Conference on Lasers and Electro-Optics (CLEO), MAY 10-15, 2020Publication Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
;Tanksalvala, Michael ;Porter, Christina L. ;Esashi, Yuka ;Wang, BinJenkins, Nicholas W.Journal article2021-01-27, SCIENCE ADVANCES, (7) 5, p.eabd9667