Browsing by Author "Dattilo, Davide"

Now showing 1 - 2 of 2

Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

Thakare, Devesh
;
Wu, Meiyi
;
Opsomer, Karl
;
Saadeh, Qais
;
Soltwisch, Victor
;
Naujok, Philipp
Journal article
2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 2, p.Art. 024403
Optimization of EUV reticle cleaning by evaluation of chemistries on wafer-based mimic test structures.

Pacco, Antoine
;
Dattilo, Davide
;
Jonckheere, Rik
;
Rip, Jens
;
Dietze, Uwe
;
Kruemberg, Jens
Proceedings paper
2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.357