Browsing by Author "Daubriac, Richard"
Now showing 1 - 3 of 3
- Results per page
- Sort Options
Publication Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis