Browsing by Author "Daviot, Jerome"
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Publication Developing TSV wet cleaning chemistry for quantum computing application
Journal article2023, MICROELECTRONIC ENGINEERING, (276) Art. 112010, p.73-83Publication Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Journal article2012-04, Solid State Phenomena, 187, p.235-239Publication Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Meeting abstract2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 19/09/2010, p.64-65Publication Process dependence on defectivity count on copper and dielectric surfaces in post-copper CMP cleaning
Publication Process Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing Applications