Browsing by Author "De Caussemaeker, Ann"
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Publication HF etching of Si-oxides and Si-nitrides for surface micromachining
; ; ; ; De Caussemaeker, AnnProceedings paper2001, Proceedings of the Sensor Technology Conference 2001, 14/05/2001, p.131-136Publication The design and fabrication of a 2560x2048 pixel microdisplay chip
Proceedings paper1999, Proceedings of the 19th International Display Research Conference - EuroDisplay, 28/09/1999, p.493-496Publication Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab
; ; ; Proceedings paper2001, Proceedings IEDM; Washington, DC, December 3-5, 2001., p.921-924