Browsing by Author "De Poortere, Etienne P."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication E-test validation of space error budget and metrology
Journal article2022-06-30, IEEE Transactions on Semiconductor Manufacturing, (35) 3, p.478-484Publication Voltage contrast determination of design rules at the limits of EUV single patterning
Journal article2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 4, p.Art. 041604