Browsing by Author "Dei, Satoshi"
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Publication Novel metal containing resists for EUV lithography extendibility
Proceedings paper2016, Extreme Ultravioelt (EUV) Lithography, 21/02/2016, p.977606Publication Photosensitized Chemically Amplified Resist (PSCAR) 2.0 for high-throughput and high-resolution EUV lithography: dual photosensitization of acid generation and quencher decomposition by flood exposure