Browsing by Author "Deng, Kerong"

Now showing 1 - 3 of 3

Controlled and Uniform Wet Etching of Molybdenum Nanowires

Deng, Kerong
;
Erofeev, Ivan
;
Ray Chowdhuri, Angshuman
;
Saidov, Khakimjon
;
Aabdin, Zainul
Proceedings paper
2023-09, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.351-355
Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Erofeev, Ivan
;
Hartanto, Antony Winata
;
Khan, Muhaimin Mareum
;
Deng, Kerong
;
Kumar, Krishna
Journal article
2025, ADVANCED MATERIALS INTERFACES, (12) 1, p.Art. 2400558
Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Deng, Kerong
;
Erofeev, Ivan
;
Chowdhuri, Angshuman Ray
;
Philipsen, Harold
;
Aabdin, Zainul
Journal article
2024, SMALL, (20) 51, p.Art. 2406713