Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Simple item page Full metadata Statistics

Files

Published version 8 MB

Author(s)

;

;

Chowdhuri, Angshuman Ray

;

Philipsen, Harold

;

;

Hartanto, Antony Winata

;

Tjiu, Weng Weei

;

Zhang, Mingsheng

;

Fernando, Devshan

;

Saidov, Khakimjon

;

;

;

Holsteyns, Frank

;

Huynh, Han Vinh

;

Mirsaidov, Utkur

Journal

SMALL

Metrics

4 since deposited on 2024-10-30

Acq. date: 2025-10-23

291 since deposited on 2024-10-30

Acq. date: 2025-10-23