Publication:

Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Date

2024
Journal article
https://doi.org/10.1002/smll.202406713
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dc.contributor.authorDeng, Kerong
dc.contributor.authorErofeev, Ivan
dc.contributor.authorChowdhuri, Angshuman Ray
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorAabdin, Zainul
dc.contributor.authorHartanto, Antony Winata
dc.contributor.authorTjiu, Weng Weei
dc.contributor.authorZhang, Mingsheng
dc.contributor.authorFernando, Devshan
dc.contributor.authorSaidov, Khakimjon
dc.contributor.authorKumar, Krishna
dc.contributor.authorPacco, Antoine
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHuynh, Han Vinh
dc.contributor.authorMirsaidov, Utkur
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecHolsteyns, Frank::0009-0002-2123-452X
dc.date.accessioned2025-04-29T06:56:40Z
dc.date.available2024-10-30T17:13:38Z
dc.date.available2025-04-29T06:56:40Z
dc.date.embargo9999-12-31
dc.date.issued2024
dc.description.wosFundingTextK.D. and I.E. contributed equally to this work. This work was supported by the Singapore National Research Foundation's Competitive Research Program funding (NRF-CRP23-2019-0001).
dc.identifier.doi10.1002/smll.202406713
dc.identifier.issn1613-6810
dc.identifier.pmidMEDLINE:39439137
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44702
dc.publisherWILEY-V C H VERLAG GMBH
dc.source.beginpageArt. 2406713
dc.source.endpageN/A
dc.source.issue51
dc.source.journalSMALL
dc.source.numberofpages8
dc.source.volume20
dc.subject.keywordsAMMONIUM-NITRATE
dc.subject.keywordsDISSOLUTION
dc.subject.keywordsTECHNOLOGY
dc.subject.keywordsMECHANISM
dc.subject.keywordsKINETICS
dc.subject.keywordsMETALS
dc.title

Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

dc.typeJournal article
dspace.entity.typePublication
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