Browsing by Author "Detlefs, Blanka"

Characterization of high-k nanolayers by grazing incidence X-ray spectrometry

Quantification of high-K nanolayers for semiconductor applications using synchrotron radiation and calibrated instrumentation

Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis

Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach

Reference-free, in-depth characterization of nanoscaled systems with advanced grazing incidence X-ray fluorescence analysis