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Characterization of high-k nanolayers by grazing incidence X-ray spectrometry
Publication:
Characterization of high-k nanolayers by grazing incidence X-ray spectrometry
Date
2014
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Müller, Matthias
;
Hönicke, Philipp
;
Detlefs, Blanka
;
Fleischmann, Claudia
Journal
Materials
Abstract
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1910
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Acq. date: 2025-10-24
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Metrics
Views
1910
since deposited on 2021-10-22
448
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations