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Characterization of high-k nanolayers by grazing incidence X-ray spectrometry

Date

2014
Journal article
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dc.contributor.authorMüller, Matthias
dc.contributor.authorHönicke, Philipp
dc.contributor.authorDetlefs, Blanka
dc.contributor.authorFleischmann, Claudia
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned2021-10-22T04:01:21Z
dc.date.available2021-10-22T04:01:21Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.issn1996-1944
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24285
dc.identifier.urlhttp://www.mdpi.com/1996-1944/7/4/3147
dc.source.beginpage3147
dc.source.endpage3159
dc.source.issue4
dc.source.journalMaterials
dc.source.volume7
dc.title

Characterization of high-k nanolayers by grazing incidence X-ray spectrometry

dc.typeJournal article
dspace.entity.typePublication
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