Browsing by Author "Diehl, D.L."
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Publication Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques
Journal article2012, Solid-State Electronics, 71, p.106-112Publication Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques
Proceedings paper2011-03, 12th International Conference on Ultimate Integration on Silicon - ULIS, 14/03/2011, p.31-33