Browsing by Author "Dilliway, Gabriela"
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Publication Challenges of single-wafer wet cleaning for low temperature pre-epitaxial treatment of SiGe
Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.243-246Publication Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Oral presentation2007, IEEE International Solid-State Circuits Conference - ISSCCPublication High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed
Publication Optimization of the MuGFET performance on super critical-strained SOI (SC-SSOI)substrates featuring raised source/drain and dual CESL
Proceedings paper2007, International Symposium on VLSI Technology, Systems, and Applications - VLSI-TSA, 23/04/2007